Characteristics and integration challenges of FinFET-based devices for (Sub-)22nm technology nodes circuit applications

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Author(s)

Veloso, Anabela

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Collaert, Nadine

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De Keersgieter, An

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Witters, Liesbeth

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Rooyackers, Rita

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Redolfi, Augusto

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;

;

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Vellianitis, Georgios

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Duriez, Blandine

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Merelle, Thomas

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Absil, Philippe

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Biesemans, Serge

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Hoffmann, Thomas Y.

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1965 since deposited on 2021-10-18

Acq. date: 2025-10-23