Authors

Veloso, Anabela; Van Dal, Mark; Collaert, Nadine; De Keersgieter, An; Witters, Liesbeth; Rooyackers, Rita; Redolfi, Augusto; Brus, Stephan; Duffy, Ray; Pawlak, Bartek; Vellianitis, Georgios; Duriez, Blandine; Merelle, Thomas; Absil, Philippe; Biesemans, Serge; Jurczak, Gosia; Hoffmann, Thomas Y.; Lander, Rob

Conference

International Conference on Solid-State Devices and Materials - SSDM

Title

Characteristics and integration challenges of FinFET-based devices for (Sub-)22nm technology nodes circuit applications

Publication type

Proceedings paper

Embargo date

9999-12-31