dc.contributor.author | Waeterloos, Joost | |
dc.contributor.author | Meynen, Herman | |
dc.contributor.author | de Potter de ten Broeck, Muriel | |
dc.contributor.author | Coenegrachts, Bart | |
dc.contributor.author | Gao, Teng | |
dc.contributor.author | Grillaert, Joost | |
dc.contributor.author | Van den hove, Luc | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-09-29T15:51:02Z | |
dc.date.available | 2021-09-29T15:51:02Z | |
dc.date.issued | 1996 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1645 | |
dc.source | IIOimport | |
dc.title | Reduction of the premetal dielectric thermal budget for a 0.35 μm technology | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | de Potter de ten Broeck, Muriel | |
dc.contributor.imecauthor | Coenegrachts, Bart | |
dc.contributor.imecauthor | Van den hove, Luc | |
dc.contributor.imecauthor | Maex, Karen | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 55 | |
dc.source.endpage | 57 | |
dc.source.conference | Proceedings of the 13th International VLSI Multilevel Interconnection Conference - VMIC | |
dc.source.conferencedate | 18/06/1996 | |
dc.source.conferencelocation | Santa Clara, CA USA | |
imec.availability | Published - imec | |