Integration of CNT/Cu hybrid interconnects for BEOL: new possibilities for ECD

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Authors
Vereecken, Philippe; Chiodarelli, Nicolo; Romo Negreira, Ainhoa; Santini, Claudia; Peys, Nick; Cott, Daire; van der Veen, Marleen; Verhulst, Anne; Arstila, Kai; Groeseneken, Guido; Heyns, Marc; De Gendt, Stefan
Conference
215th Electrochemical Society Spring Meeting
Title
Integration of CNT/Cu hybrid interconnects for BEOL: new possibilities for ECD
Publication type
Meeting abstract
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