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Integration of CNT/Cu hybrid interconnects for BEOL: new possibilities for ECD

dc.contributor.authorVereecken, Philippe
dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorRomo Negreira, Ainhoa
dc.contributor.authorSantini, Claudia
dc.contributor.authorPeys, Nick
dc.contributor.authorCott, Daire
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorVerhulst, Anne
dc.contributor.authorArstila, Kai
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-18T04:45:46Z
dc.date.available2021-10-18T04:45:46Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16471
dc.sourceIIOimport
dc.titleIntegration of CNT/Cu hybrid interconnects for BEOL: new possibilities for ECD
dc.typeMeeting abstract
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorRomo Negreira, Ainhoa
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorVerhulst, Anne
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecVerhulst, Anne::0000-0002-3742-9017
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpage969
dc.source.conference215th Electrochemical Society Spring Meeting
dc.source.conferencedate24/05/2009
dc.source.conferencelocationSan Francisco, CA USA
dc.identifier.urlhttp://ecsmeet7.peerx-press.org/ms_files/ecsmeet7/2008/12/19/00002286/00/2286_0_art_1_kc4gph.pdf
imec.availabilityPublished - imec
imec.internalnotesMeeting Abstracts; MA 2009-01


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