Authors

Vos, Ingrid; Hellin, David; Vereecke, Guy; Pavel, Elisabeth; Boullart, Werner; Vertommen, Johan

ISSN

1071-1023

Issue

5

Journal

Journal of Vacuum Science and Technology B

Volume

27

Title

The effect of etch-clean delay time on post-etch residue removal for front-end-of-line applications

Publication type

Journal article