Publication:
The effect of etch-clean delay time on post-etch residue removal for front-end-of-line applications
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1893 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-11
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Metrics
Views
1893 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-11
Citations