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Study of the interplay between dry etch and wet clean in patterning La2O3/HfO2 containing high-k/metal gate stacks
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Authors
Vos, Ingrid
;
Hellin, David
;
Vrancken, Christa
;
Vecchio, Emma
;
Paraschiv, Vasile
;
Vertommen, Johan
;
Boullart, Werner
Conference
216th ECS Meeting
Title
Study of the interplay between dry etch and wet clean in patterning La2O3/HfO2 containing high-k/metal gate stacks
Publication type
Meeting abstract
Embargo date
9999-12-31
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