Publication:
New wet process strategies for reduced La2O3 and MgO2 high-k cap-dielectric loss
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1927 since deposited on 2021-10-18
4last month
1last week
Acq. date: 2025-12-09
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Metrics
Views
1927 since deposited on 2021-10-18
4last month
1last week
Acq. date: 2025-12-09
Citations