Publication:
New wet process strategies for reduced La2O3 and MgO2 high-k cap-dielectric loss
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Downloads
1 since deposited on 2021-10-18
Acq. date: 2026-02-25
Views
1968 since deposited on 2021-10-18
4last month
Acq. date: 2026-02-25
Citations
Statistics
Downloads
1 since deposited on 2021-10-18
Acq. date: 2026-02-25
Views
1968 since deposited on 2021-10-18
4last month
Acq. date: 2026-02-25
Citations