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New wet process strategies for reduced La2O3 and MgO2 high-k cap-dielectric loss

dc.contributor.authorWada, Masayuki
dc.contributor.authorVos, Rita
dc.contributor.authorClaes, Martine
dc.contributor.authorSchram, Tom
dc.contributor.authorSnow, J.
dc.contributor.authorMertens, Paul
dc.contributor.authorEitoku, Atsuro
dc.date.accessioned2021-10-18T05:05:34Z
dc.date.available2021-10-18T05:05:34Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16516
dc.sourceIIOimport
dc.titleNew wet process strategies for reduced La2O3 and MgO2 high-k cap-dielectric loss
dc.typeMeeting abstract
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorMertens, Paul
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2058
dc.source.conference216th ECS Meeting
dc.source.conferencedate4/10/2009
dc.source.conferencelocationVienna Austria
imec.availabilityPublished - open access
imec.internalnotesMeeting Abstracts; Vol. 25, issue 5


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