Authors

Wang, Gang; Loo, Roger; Souriau, Laurent; Takeuchi, Shotaro; De Jaeger, Brice; Lee, W; Caymax, Matty; Lin, Vic; Vandervorst, Wilfried; Blanpain, Bart; Heyns, Marc

Conference

E-MRS Spring Meeting Symposium I: Silicon and Germanium Issues for Future CMOS Devices

Title

Fabrication of high quality Ge virtual substrates by selective epitaxial growth in shallow trench isolated Si (001) trenches

Publication type

Meeting abstract