Publication:
In-situ growth of Cu-Mn alloy self-forming barriers in 100 nm Cu/Low-k damascene interconnects
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1969 since deposited on 2021-10-18
2last month
Acq. date: 2026-02-24
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Statistics
Views
1969 since deposited on 2021-10-18
2last month
Acq. date: 2026-02-24
Citations