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Statistical analysis of the influence of thinning processes on the strength of silicon

dc.contributor.authorYang, Yu
dc.contributor.authorCotrin Teixeira, Ricardo
dc.contributor.authorRoussel, Philippe
dc.contributor.authorSwinnen, Bart
dc.contributor.authorVerlinden, Bert
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-18T05:31:22Z
dc.date.available2021-10-18T05:31:22Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16574
dc.sourceIIOimport
dc.titleStatistical analysis of the influence of thinning processes on the strength of silicon
dc.typeProceedings paper
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorSwinnen, Bart
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1112-E03-09
dc.source.conferenceMaterials Technology for 3-D Integration
dc.source.conferencedate1/12/2008
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Symposium Proceedings; Vol. 1112


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