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Proximity bias swing: origin and characterization

dc.contributor.authorZandbergen, Peter
dc.contributor.authorGehoel-van Ansem, Wendy
dc.contributor.authorde Klerk, Jos
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorLinskens, Frank
dc.date.accessioned2021-10-18T05:40:26Z
dc.date.available2021-10-18T05:40:26Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16594
dc.sourceIIOimport
dc.titleProximity bias swing: origin and characterization
dc.typeProceedings paper
dc.contributor.imecauthorVandenberghe, Geert
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage837
dc.source.endpage844
dc.source.conferenceAdvances in Resist Technology and Processing XV
dc.source.conferencedate23/02/1998
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 3333


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