Show simple item record

Atomic layer deposition of Ru and RuO2 for MIMCAP applications

dc.contributor.authorZhao, Chao
dc.contributor.authorPawlak, Malgorzata
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorSchaekers, Marc
dc.contributor.authorSleeckx, Erik
dc.contributor.authorVancoille, Eric
dc.contributor.authorWouters, Dirk
dc.contributor.authorTokei, Zsolt
dc.contributor.authorKittl, Jorge
dc.date.accessioned2021-10-18T05:45:09Z
dc.date.available2021-10-18T05:45:09Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16605
dc.sourceIIOimport
dc.titleAtomic layer deposition of Ru and RuO2 for MIMCAP applications
dc.typeProceedings paper
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorSleeckx, Erik
dc.contributor.imecauthorVancoille, Eric
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecSleeckx, Erik::0000-0003-2560-6132
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage377
dc.source.endpage387
dc.source.conferenceAtomic Layer Deposition Applications 5
dc.source.conferencedate4/10/2009
dc.source.conferencelocationVienna Austria
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 25, issue 4


Files in this item

Thumbnail
Name:
18526.pdf
Size:
411.9Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record