Atomic layer deposition of Ru and RuO2 for MIMCAP applications

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Authors
Zhao, Chao; Pawlak, Malgorzata; Popovici, Mihaela Ioana; Schaekers, Marc; Sleeckx, Erik; Vancoille, Eric; Wouters, Dirk; Tokei, Zsolt; Kittl, Jorge
Conference
Atomic Layer Deposition Applications 5
Title
Atomic layer deposition of Ru and RuO2 for MIMCAP applications
Publication type
Proceedings paper
Embargo date
9999-12-31
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