Publication:
Atomic layer deposition of Ru and RuO2 for MIMCAP applications
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
2041 since deposited on 2021-10-18
4last month
3last week
Acq. date: 2026-01-09
Citations
Metrics
Views
2041 since deposited on 2021-10-18
4last month
3last week
Acq. date: 2026-01-09
Citations