Publication:
Atomic layer deposition of Ru and RuO2 for MIMCAP applications
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2033 since deposited on 2021-10-18
6last month
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Acq. date: 2026-01-11
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Views
2033 since deposited on 2021-10-18
6last month
3last week
Acq. date: 2026-01-11
Citations