Show simple item record

Atomic layer deposition of Ru and RuO2 for MIMCAP applications

dc.contributor.authorZhao, Chao
dc.contributor.authorPawlak, Malgorzata
dc.contributor.authorSchaekers, Marc
dc.contributor.authorSleeckx, Erik
dc.contributor.authorVancoille, Eric
dc.contributor.authorWouters, Dirk
dc.contributor.authorTokei, Zsolt
dc.contributor.authorKittl, Jorge
dc.date.accessioned2021-10-18T05:45:38Z
dc.date.available2021-10-18T05:45:38Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16606
dc.sourceIIOimport
dc.titleAtomic layer deposition of Ru and RuO2 for MIMCAP applications
dc.typeMeeting abstract
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorSleeckx, Erik
dc.contributor.imecauthorVancoille, Eric
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecSleeckx, Erik::0000-0003-2560-6132
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2052
dc.source.conference216th ECS Meeting
dc.source.conferencedate4/10/2009
dc.source.conferencelocationVienna Austria
imec.availabilityPublished - open access
imec.internalnotesMeeting Abstracts; Vol. MA2009-02


Files in this item

Thumbnail
Name:
19000.pdf
Size:
174.8Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record