Publication:

Fundamental study on the impact of C Co-implantation on ultra shallow B junctions

Date

2009
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Zschaetzsch, Gerd
;
Vandervorst, Wilfried  
;
Hoffmann, Thomas Y.
;
Everaert, Jean-Luc
;
del Agua Borniquel, Jose Ignacio  

Journal

Abstract

Description

Statistics

Views

1939 since deposited on 2021-10-18
Acq. date: 2026-02-24

Citations

Statistics

Views

1939 since deposited on 2021-10-18
Acq. date: 2026-02-24

Citations