Authors

Aarts, Arno; Srivannavit, Onnop; Wise, Kensall D.; Yoon, Euisik; Pereira Neves, Hercules; Puers, Bob; Van Hoof, Chris

Conference

21st Micromechanics and Microsystems Europe Workshop - MME

Title

Fabrication technique of a compressible biocompatible interconnect using a thin film transfer process

Publication type

Proceedings paper