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Fabrication technique of a compressible biocompatible interconnect using a thin film transfer process

dc.contributor.authorAarts, Arno
dc.contributor.authorSrivannavit, Onnop
dc.contributor.authorWise, Kensall D.
dc.contributor.authorYoon, Euisik
dc.contributor.authorPereira Neves, Hercules
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-18T15:14:59Z
dc.date.available2021-10-18T15:14:59Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16621
dc.sourceIIOimport
dc.titleFabrication technique of a compressible biocompatible interconnect using a thin film transfer process
dc.typeProceedings paper
dc.contributor.imecauthorAarts, Arno
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.source.peerreviewyes
dc.source.beginpage165
dc.source.endpage168
dc.source.conference21st Micromechanics and Microsystems Europe Workshop - MME
dc.source.conferencedate26/09/2010
dc.source.conferencelocationEnschede The Netherlands
imec.availabilityPublished - imec


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