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SEG and uniaxial strain influence on FinFET performance at low temperature

dc.contributor.authorAgopian, P.G.D.
dc.contributor.authorPacheco, V.H.
dc.contributor.authorMartino, J.A.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-18T15:15:14Z
dc.date.available2021-10-18T15:15:14Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16636
dc.sourceIIOimport
dc.titleSEG and uniaxial strain influence on FinFET performance at low temperature
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage23
dc.source.endpage26
dc.source.conference9th International Workshop on Low Temperature Electronics - WOLTE
dc.source.conferencedate21/06/2010
dc.source.conferencelocationGuaruja Brazil
imec.availabilityPublished - open access


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