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Impact of "terminal effect" on Cu plating: options and roadmap

dc.contributor.authorArmini, Silvia
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVolders, Henny
dc.contributor.authorEl-Mekki, Zaid
dc.contributor.authorRadisic, Alex
dc.contributor.authorBeyer, Gerald
dc.contributor.authorRuythooren, Wouter
dc.contributor.authorVereecken, Philippe
dc.date.accessioned2021-10-18T15:16:06Z
dc.date.available2021-10-18T15:16:06Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16665
dc.sourceIIOimport
dc.titleImpact of "terminal effect" on Cu plating: options and roadmap
dc.typeOral presentation
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorEl-Mekki, Zaid
dc.contributor.imecauthorRadisic, Alex
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorRuythooren, Wouter
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.contributor.orcidimecEl-Mekki, Zaid::0000-0002-9851-9139
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceMaterials for Advanced Metallization Conference
dc.source.conferencedate7/03/2010
dc.source.conferencelocationMechelen Belgium
dc.identifier.urlhttp://www.mam-conference.org/Mam-conference/Welcome.html
imec.availabilityPublished - imec


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