Authors

Bekaert, Joost; Van Look, Lieve; Truffert, Vincent; Lazzarino, Frederic; Vandenberghe, Geert; Reybrouck, Mario; Tarutani, Shinji

ISSN

1537-1646

Issue

4

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

9

Title

Comparing positive and negative tone development process for printing the metal and contact layers of the 32- and 22-nm node

Publication type

Journal article

Embargo date

9999-12-31