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Growth and characterization of hexagonal boron nitride by unbalanced RF magnetron sputtering
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Authors
BenMoussa, B.
;
D'Haen, Jan
;
Borschel, C.
;
Goris, L.
;
Soltani, A.
;
Mortet, Vincent
;
Ronning, C.
;
D'Olieslaeger, Marc
;
Boyen, H.G.
;
Haenen, Ken
Conference
Hasselt Diamond Workshop - SBDD XV
Title
Growth and characterization of hexagonal boron nitride by unbalanced RF magnetron sputtering
Publication type
Oral presentation
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