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Growth and characterization of hexagonal boron nitride by unbalanced RF magnetron sputtering

dc.contributor.authorBenMoussa, B.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorBorschel, C.
dc.contributor.authorGoris, L.
dc.contributor.authorSoltani, A.
dc.contributor.authorMortet, Vincent
dc.contributor.authorRonning, C.
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorBoyen, H.G.
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-18T15:20:16Z
dc.date.available2021-10-18T15:20:16Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16735
dc.sourceIIOimport
dc.titleGrowth and characterization of hexagonal boron nitride by unbalanced RF magnetron sputtering
dc.typeOral presentation
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conferenceHasselt Diamond Workshop - SBDD XV
dc.source.conferencedate22/02/2010
dc.source.conferencelocationHasselt Belgium
imec.availabilityPublished - imec


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