Novel dual layer floating gate structure as enabler of fully planar flash memory

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Authors
Blomme, Pieter; Rosmeulen, Maarten; Cacciato, Antonio; Kostermans, Maarten; Vrancken, Christa; Van Aerde, Steven; Schram, Tom; Debusschere, Ingrid; Jurczak, Gosia; Van Houdt, Jan
Conference
IEEE Symposium on VLSI Technology
Title
Novel dual layer floating gate structure as enabler of fully planar flash memory
Publication type
Proceedings paper
Embargo date
9999-12-31
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