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Non-destructive characterization of activated ion-implanted doping profiles based on photomodulated optical reflectance
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Authors
Bogdanowicz, Janusz
;
Clarysse, Trudo
;
Moussa, Alain
;
Mody, Jay
;
Eyben, Pierre
;
Vandervorst, Wilfried
;
Rosseel, Erik
Conference
18th International Conference on Ion Implantation Technology
Title
Non-destructive characterization of activated ion-implanted doping profiles based on photomodulated optical reflectance
Publication type
Oral presentation
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