dc.contributor.author | Bogdanowicz, Janusz | |
dc.contributor.author | Clarysse, Trudo | |
dc.contributor.author | Moussa, Alain | |
dc.contributor.author | Mody, Jay | |
dc.contributor.author | Eyben, Pierre | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Rosseel, Erik | |
dc.date.accessioned | 2021-10-18T15:23:13Z | |
dc.date.available | 2021-10-18T15:23:13Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16770 | |
dc.source | IIOimport | |
dc.title | Non-destructive characterization of activated ion-implanted doping profiles based on photomodulated optical reflectance | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Bogdanowicz, Janusz | |
dc.contributor.imecauthor | Moussa, Alain | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Rosseel, Erik | |
dc.contributor.orcidimec | Bogdanowicz, Janusz::0000-0002-7503-8922 | |
dc.source.peerreview | no | |
dc.source.conference | 18th International Conference on Ion Implantation Technology | |
dc.source.conferencedate | 6/06/2010 | |
dc.source.conferencelocation | Kyoto Japan | |
imec.availability | Published - imec | |