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Articles
Optically enhanced i-line lithography for 0.3-μm random logic applications
Publication:
Optically enhanced i-line lithography for 0.3-μm random logic applications
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Date
1996
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Yen, Anthony
;
Tzviatkov, Plamen
;
Grozev, Grozdan
Journal
Solid State Technology
Abstract
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2
since deposited on 2021-09-29
Acq. date: 2026-01-06
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1966
since deposited on 2021-09-29
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Acq. date: 2026-01-07
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Downloads
2
since deposited on 2021-09-29
Acq. date: 2026-01-06
Views
1966
since deposited on 2021-09-29
1
last month
Acq. date: 2026-01-07
Citations