Optically enhanced i-line lithography for 0.3-μm random logic applications

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Authors

Yen, Anthony; Tzviatkov, Plamen; Grozev, Grozdan

Issue

March

Journal

Solid State Technology

Volume

39

Title

Optically enhanced i-line lithography for 0.3-μm random logic applications

Publication type

Journal article

Embargo date

9999-12-31

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