Publication:

The mechanism of low-k SiOCH film modification by oxygen atoms

Date

2010
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

21143.pdf 798.43 KB

Author(s)

Braginsky, O.V.
;
Kovalev, A.S.
;
Lopaev, D.V.
;
Malykhin, E.M.
;
Mankelevich, Y.A.
;
Rakhimova, T.V.
;
Rakhimov, A.T.
;
Vasilieva, A.N.
;
Zyryanov, S.M.
;
Baklanov, Mikhaïl

Journal

Journal of Applied Physics

Abstract

Description

Statistics

Views

1908 since deposited on 2021-10-18
Acq. date: 2026-04-26

Citations

Statistics

Views

1908 since deposited on 2021-10-18
Acq. date: 2026-04-26

Citations