Electrical properties of InGaAs/high-k oxide interfaces: measurement and simulation

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Authors
Brammertz, Guy; Lin, Dennis; Alian, AliReza; Merckling, Clement; Chang, Mark; Wang, Wei-E; Passlack, Matthias; Caymax, Matty; Meuris, Marc; Heyns, Marc
Conference
MRS Spring Meeting Symposium I: Materials for End-of-Roadmap Scaling of CMOS Devices
Title
Electrical properties of InGaAs/high-k oxide interfaces: measurement and simulation
Publication type
Meeting abstract
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