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The influence of the angle of incidence in megasonic cleaning
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Authors
Brems, Steven
;
Hauptmann, Marc
;
Camerotto, Elisabeth
;
Xu, XiuMei
;
De Gendt, Stefan
;
Heyns, Marc
;
Mertens, Paul
Conference
10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS
Title
The influence of the angle of incidence in megasonic cleaning
Publication type
Meeting abstract
Embargo date
9999-12-31
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