Authors

Bryce, George; Severi, Simone; Van Hoof, Rita; Guo, Bin; Kunnen, Eddy; Witvrouw, Ann; Decoutere, Stefaan

Conference

Sensors, Actuators, and Microsystems (General)

Title

Development, optimization and evaluation of a CF4 pretreatment process to remove unwanted interfacial layers in stacks of CVD and PECVD polycrystalline silicon-germanium for MEMS applications

Publication type

Proceedings paper