Publication:

A novel PEALD tunnel dielectric for three-dimensional non-volatile charge-trapping technology

Date

2010

Proceedings Paper

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Author(s)

Cacciato, Antonio

;

Breuil, Laurent

;

Dekkers, Harold

;

Zahid, Mohammed

;

Kar, Gouri Sankar

;

Everaert, Jean-Luc

;

;

Van den Bosch, Geert

;

;

Debusschere, Ingrid

;

;

Cockburn, Andrew

;

;

;

;

Metrics

1974 since deposited on 2021-10-18

Acq. date: 2025-12-10