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A novel PEALD tunnel dielectric for three-dimensional non-volatile charge-trapping technology
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Authors
Cacciato, Antonio
;
Breuil, Laurent
;
Dekkers, Harold
;
Zahid, Mohammed
;
Kar, Gouri Sankar
;
Everaert, Jean-Luc
;
Schoofs, Geert
;
Van den Bosch, Geert
;
Jurczak, Gosia
;
Debusschere, Ingrid
;
Van Houdt, Jan
;
Cockburn, Andrew
;
Date, Lucien
;
Xa, Li-Qun
;
Le, Maggie
;
Lee, Won
Conference
IEEE Semiconductor Interface Specialists Conference - SISC
Title
A novel PEALD tunnel dielectric for three-dimensional non-volatile charge-trapping technology
Publication type
Proceedings paper
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