Substrates and gate dielectrics: the materials issue for sub-22nm CMOS scaling

Thumbnail
Metadata
Show full item record
Authors
Caymax, Matty; Bellenger, Florence; Brammertz, Guy; Dekoster, Johan; Delabie, Annelies; Loo, Roger; Merckling, Clement; Nguyen, Duy; Nyns, Laura; Sioncke, Sonja; Vincent, Benjamin; Wang, Gang; Vandervorst, Wilfried; Heyns, Marc
Conference
MRS Spring Meeting Symposium I: Materials for End-of-Roadmap scaling of CMOS devices
Title
Substrates and gate dielectrics: the materials issue for sub-22nm CMOS scaling
Publication type
Meeting abstract
Collections