Publication:

Substrates and gate dielectrics: the materials issue for sub-22nm CMOS scaling

Date

2010
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Author(s)

Caymax, Matty  
;
Bellenger, Florence
;
Brammertz, Guy  
;
Dekoster, Johan  
;
Delabie, Annelies  
;
Loo, Roger  
;
Merckling, Clement  
;
Nguyen, Duy
;
Nyns, Laura  
;
Sioncke, Sonja
;
Vincent, Benjamin  
;
Wang, Gang
;
Vandervorst, Wilfried  
;
Heyns, Marc  

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1881 since deposited on 2021-10-18
Acq. date: 2026-08-25

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1881 since deposited on 2021-10-18
Acq. date: 2026-08-25

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