Benchmarking SOI and bulk FinFET alternatives for PLANAR CMOS scaling succession

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Author(s)

Chiarella, Thomas

;

Witters, Liesbeth

;

Mercha, Abdelkarim

;

Kerner, Christoph

;

Rakowski, Michal

;

Ortolland, Claude

;

Ragnarsson, Lars-Ake

;

Parvais, Bertrand

;

De Keersgieter, An

;

Kubicek, Stefan

;

Redolfi, Augusto

;

Vrancken, Christa

;

;

;

Absil, Philippe

;

Biesemans, Serge

;

Hoffmann, Thomas Y.

Journal

Solid-State Electronics

Metrics

1971 since deposited on 2021-10-18

Acq. date: 2025-10-23