Interface/bulk trap recovery after submeltl aser anneal and the impact to NBTI reliability

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Authors

Cho, Moon Ju; Aoulaiche, Marc; Degraeve, Robin; Ortolland, Claude; Kauerauf, Thomas; Kaczer, Ben; Roussel, Philippe; Hoffmann, Thomas Y.; Groeseneken, Guido

ISSN

0741-3106

Issue

6

Journal

IEEE Electron Device Letters

Volume

31

Title

Interface/bulk trap recovery after submeltl aser anneal and the impact to NBTI reliability

Publication type

Journal article

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