Authors

Claes, Gert; Severi, Simone; Van Hoof, Rita; Decoutere, Stefaan; Celis, Jean-Pierre; Witvrouw, Ann

Conference

23rd IEEE International Conference on Micro Electro Mechanical Systems - MEMS

Title

Influence of the novel anchor design on the shear strength of poly-SiGe thin film wafer level packages

Publication type

Proceedings paper