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Micro probe carrier profiling of ultra-shallow structures in germanium

dc.contributor.authorClarysse, Trudo
dc.contributor.authorMoussa, Alain
dc.contributor.authorParmentier, Brigitte
dc.contributor.authorEyben, Pierre
dc.contributor.authorDouhard, Bastien
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorNielsen, Peter
dc.contributor.authorLin, Rong
dc.contributor.authorPetersen, Dirch
dc.contributor.authorWang, Fei
dc.contributor.authorHansen, Ole
dc.date.accessioned2021-10-18T15:39:01Z
dc.date.available2021-10-18T15:39:01Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16891
dc.sourceIIOimport
dc.titleMicro probe carrier profiling of ultra-shallow structures in germanium
dc.typeProceedings paper
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorParmentier, Brigitte
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewyes
dc.source.beginpage1252-I05-20
dc.source.conferenceMaterials and Devices for End-of-Roadmap and Beyond CMOS Scaling
dc.source.conferencedate5/04/2010
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 1252


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