Micro probe carrier profiling of ultra-shallow structures in germanium

Thumbnail
Metadata
Show full item record
Authors
Clarysse, Trudo; Moussa, Alain; Parmentier, Brigitte; Eyben, Pierre; Douhard, Bastien; Vandervorst, Wilfried; Nielsen, Peter; Lin, Rong; Petersen, Dirch; Wang, Fei; Hansen, Ole
Conference
Materials and Devices for End-of-Roadmap and Beyond CMOS Scaling
Title
Micro probe carrier profiling of ultra-shallow structures in germanium
Publication type
Proceedings paper
Collections