Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Micro probe carrier profiling of ultra-shallow structures in germanium
Publication:
Micro probe carrier profiling of ultra-shallow structures in germanium
Date
2010
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Clarysse, Trudo
;
Moussa, Alain
;
Parmentier, Brigitte
;
Eyben, Pierre
;
Douhard, Bastien
;
Vandervorst, Wilfried
;
Nielsen, Peter
;
Lin, Rong
;
Petersen, Dirch
;
Wang, Fei
;
Hansen, Ole
Journal
Abstract
Description
Metrics
Views
1937
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
1937
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations