Publication:

Micro probe carrier profiling of ultra-shallow structures in germanium

Date

2010
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorClarysse, Trudo
dc.contributor.authorMoussa, Alain
dc.contributor.authorParmentier, Brigitte
dc.contributor.authorEyben, Pierre
dc.contributor.authorDouhard, Bastien
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorNielsen, Peter
dc.contributor.authorLin, Rong
dc.contributor.authorPetersen, Dirch
dc.contributor.authorWang, Fei
dc.contributor.authorHansen, Ole
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorParmentier, Brigitte
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-18T15:39:01Z
dc.date.available2021-10-18T15:39:01Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16891
dc.source.beginpage1252-I05-20
dc.source.conferenceMaterials and Devices for End-of-Roadmap and Beyond CMOS Scaling
dc.source.conferencedate5/04/2010
dc.source.conferencelocationSan Francisco, CA USA
dc.title

Micro probe carrier profiling of ultra-shallow structures in germanium

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions