dc.contributor.author | Cui, Hushan | |
dc.contributor.author | Van Hoof, Rita | |
dc.contributor.author | Severi, Simone | |
dc.contributor.author | Witvrouw, Ann | |
dc.contributor.author | Knoops, An | |
dc.contributor.author | Delande, Tinne | |
dc.contributor.author | Pancken, Joris | |
dc.contributor.author | Claes, Martine | |
dc.date.accessioned | 2021-10-18T15:44:34Z | |
dc.date.available | 2021-10-18T15:44:34Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16924 | |
dc.source | IIOimport | |
dc.title | Wafer level characterization of the sacrificial HDP oxide lateral etching by anhydrous vapor HF with ethanol vapor for SiGe MEMS structures | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Van Hoof, Rita | |
dc.contributor.imecauthor | Severi, Simone | |
dc.contributor.imecauthor | Delande, Tinne | |
dc.contributor.imecauthor | Pancken, Joris | |
dc.contributor.imecauthor | Claes, Martine | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 295 | |
dc.source.endpage | 307 | |
dc.source.conference | Chemical Sensors 9 - and MEMS/NEMS 9 | |
dc.source.conferencedate | 10/10/2010 | |
dc.source.conferencelocation | Las Vegas, NV USA | |
imec.availability | Published - open access | |
imec.internalnotes | ECS Transactions; Vol. 33, Iss. 8 | |