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A MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonators
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Authors
Dancila, Dragos
;
Ekkels, Phillip
;
Rottenberg, Xavier
;
Huynen, Isabelle
;
De Raedt, Walter
;
Tilmans, Harrie
Conference
IEEE 23rd International Conference on Micro Electro Mechanical Systems - MEMS
Title
A MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonators
Publication type
Proceedings paper
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