Authors

Dancila, Dragos; Ekkels, Phillip; Rottenberg, Xavier; Huynen, Isabelle; De Raedt, Walter; Tilmans, Harrie

Conference

IEEE 23rd International Conference on Micro Electro Mechanical Systems - MEMS

Title

A MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonators

Publication type

Proceedings paper