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A MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonators

dc.contributor.authorDancila, Dragos
dc.contributor.authorEkkels, Phillip
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorHuynen, Isabelle
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-18T15:45:37Z
dc.date.available2021-10-18T15:45:37Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16930
dc.sourceIIOimport
dc.titleA MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonators
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.beginpage723
dc.source.endpage726
dc.source.conferenceIEEE 23rd International Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate24/01/2010
dc.source.conferencelocationHong Kong China
imec.availabilityPublished - imec


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