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Use of optical and electrical measurement techniques throughout the MEMS device qualification process

dc.contributor.authorDe Coster, Jeroen
dc.date.accessioned2021-10-18T15:46:55Z
dc.date.available2021-10-18T15:46:55Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16938
dc.sourceIIOimport
dc.titleUse of optical and electrical measurement techniques throughout the MEMS device qualification process
dc.typeOral presentation
dc.contributor.imecauthorDe Coster, Jeroen
dc.source.peerreviewno
dc.source.conferenceMEMUNITY Workshop
dc.source.conferencedate15/09/2010
dc.source.conferencelocationDortmund Germany
imec.availabilityPublished - imec


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