Nanotechnology – can 0D, 1D and 2D processes enable 3D CMOS applications?

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Authors
De Gendt, Stefan; Chiodarelli, Nicolo; Cott, Daire; van der Veen, Marleen; Vereecken, Philippe
Conference
Rusnanotech
Title
Nanotechnology – can 0D, 1D and 2D processes enable 3D CMOS applications?
Publication type
Proceedings paper
Embargo date
9999-12-31
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