Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)

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Author(s)

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Van Bockstael, C.

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Van Meirhaeghe, R.L.

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Detavernier, C.

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Verleysen, Eveline

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Vandervorst, Wilfried

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Jordan-Sweet, J.

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Journal

Applied Physics Letters

Metrics

1890 since deposited on 2021-10-18

Acq. date: 2025-12-08