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The metal hard-mask approach for contact patterning
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Authors
de Marneffe, Jean-Francois
;
Lazzarino, Frederic
;
Goossens, Danny
;
Conard, Thierry
;
Hoflijk, Ilse
;
Shamiryan, Denis
;
Struyf, Herbert
;
Boullart, Werner
Conference
International Conference on Micro- and Nanoelectronics 2009
Title
The metal hard-mask approach for contact patterning
Publication type
Proceedings paper
Embargo date
9999-12-31
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